Examples

The secondary mass spectrometry belongs to the established material analysis techniques. For measuring a depth profile SIMS is used as a standard method. Measurements close to the surface set a typical range from 1nm to 20 µm and a lateral range from 50µm up to  500µm. Quantitative analyses from hydrogen to uran allow a valuation of the material quality of solid bodies. Besides depth profiles surface images with a lateral resolution up to the µm range give the possibility for an exact valuation of the material structure. CAMECA spectrometers can detect concentrations up to the ppb range in the material.