Lateral element distributions with a resolution of around 1 µm can be detected as element maps. By integrating several adjacent pixels it is possible to analyse micro volumes with high detection probabilities. In the adjoining figure the element distribution in a medical tintanium implant is shown. The size of the figure amounts 400 x 400 µm². Ti is marked green, Na blue, and Ca red. In the left part the metallic implant is visible. Between the bone tissue (indicated by Ca) and the implant there is a hydroxylapatite layer (indicated by Na) which is interspersed with Ti.
By the mentioned integration of adjacent pixels in three dimensions (lateral and in the depth) the spacial element distribution can be determined. In the figure it is shown for oxygen in a silicon sample. In this figure, the depth dimension is given by z.