Strengths
- High sensitivities
- Very low detection limits (ppm and below)
- Depth profiles with high depth resolution (1 nm) at low detection limits
- Detection of any element in the mass range from 1H to 238U
- High lateral resolution (1 µm)
- High dynamic range (6 orders of magnitude)
Limitations
- Destruction of the sample surface
- Mixing and recoil processes
- Topographical effects, surface roughness
- High variation of ionisation cross sections
- Matrix dependence of detection sensitivities
- No information about chemical bonds
- Solid and vacuum resistant samples are required
16. September 2019
RTG Mikroanalyse GmbH Berlin
